Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies

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Y. Pauleau
Springer Science & Business Media, 30 apr 2002 - 363 pagine

An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface chemistry, growth mechanisms and the modelling of deposition processes are thoroughly described and discussed to provide a clear understanding of the growth of thin films and microstructures via thermally activated, laser induced, photon assisted, ion beam assisted, and plasma enhanced vapour deposition processes.

A handbook for engineers and scientists and an introduction for students of microelectronics.

 

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Sommario

ELECTROPLATING AND ELECTROLESS DEPOSITION PROCESSES FOR ELECTRONIC COMPONENTS AND MICROSYSTEMS
xv
SELFASSEMBLED ELECTROACITVE ULTRATHIN FILMS
13
FEATURE AND MECHANISMS OF LAYER GROWTH IN LIQUID PHASE EPITAXY OF SEMICONDUCTOR MATERIALS
37
SOLGEL DEPOSITION PROCESSES OF THIN CERAMIC FILMS
63
THIN FILM DEPOSITION BY SOLGEL AND CVD PROCESSING OF METALORGANIC PRECURSORS
85
NUMERICAL SIMULATION OF FLOW AND CHEMISTRY IN THERMAL CHEMICAL VAPOR DEPOSITION PROCESSES
113
CHEMICAL VAPOR DEPOSITION OF SUPERCONDUCTOR AND OXIDE FILMS
139
SELECTIVE CHEMICAL VAPOR DEPOSITION
165
PHOTOCHEMICAL VAPOUR DEPOSITION OF THIN FILMS
193
REACTION MECHANISMS IN LASERASSISTED CHEMICAL VAPOR DEPOSITION OF MICROSTRUCTURES
217
PROXIMAL PROBE INDUCED CHEMICAL PROCESSING FOR NANODEVICE ELABORATION
249
MOLECULAR DYNAMICS SIMULATION OF THIN FILM GROWTH WITH ENERGETIC ATOMS
277
DEPOSITION OF THIN FILMS BY SPUTTERING
303
MASSTRANSPORT IN AN AUSTENITIC STAINLESS STEEL UNDER HIGHFLUX LOWENERGY NITROGEN ION BOMBARDMENT AT ELE...
329
INDEX
355
Copyright

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